Specific Process Knowledge/Lithography/Resist/UVresist: Difference between revisions
| Line 493: | Line 493: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!AZ 5214E | !AZ 5214E | ||
| 2024-11-29<br>taran | | <s>2024-11-29</s><br>2025-08-15<br>taran | ||
| 1.5 µm | | 1.5 µm | ||
| Fast | | Fast | ||
| 105 mJ/cm<sup>2</sup> | | <s>105 mJ/cm<sup>2</sup></s><br>110 mJ/cm<sup>2</sup> | ||
| 3 | | <s>3</s><br>-1 | ||
| 1.75 µm | | 1.75 µm | ||
| Dev: SP60s<br>See QC data for latest values | | Dev: SP60s<br>See QC data for latest values | ||