Getting Started with Cleanroom Fabrication (and Characterization)

As a new user to DTU Nanolab (and nano- and microfabrication), it might be difficult for you to find a good starting point on how to access our facility. This page is a guideline on how to start your process in our cleanroom. Not all points listed below might be relevant for you. You are always welcome to contact us at nanolabsupport@nanolab.dtu.dk, if you have any questions.

Register as user at www.nanolab.dtu.dk/access
- Registration in DTU Nanolabs administration system (name, project number, supervisor)
- Access to relevant Safety Training
- Log-in data to DTU Learn and labmanger.dtu.dk
- Access card (DTU personel receives access on their personal DTU cards, external users will receive a DTU access card from DTU Nanolabs administration (building 347))
Complete Safety training
- Online Introductory Course (on DTU Learn)

(incl Introduction to LabAdviser and LabManager)

Safety hands-on training, if required

Create your Fabrication Process
- Choose Substrate
- Define Process Flow
- Verify that Cross Contamination is not an issue in your process
- Optional: Process Flow review by Fabrication Support
Equiment Training
- Online and Group Hands-on training Tool Package Training (TPT), if required
- Read manuals
- Print and laminate your process flow
- Have substrates ready (or request assistance for purchase)
- Request hands-on training at training@nanolab.dtu.dk

Please provide information relevant to your training: Sample (material, size), contamination from previous processes, process and parameters for equipment training
If possible, please attach your process flow to the request

Equipment Booking
- Book equipment at labmanager.dtu.dk, if authorized
- Equipment booking for training sessions is commonly booked by the trainer
Run the Process Flow
- Purchase your wafer or Bring your samples into the cleanroom, if relevant
- Log into one of the available cleanroom computer with your credentials
- Log into labmanger.dtu.dk using the same credentials
- Start usage
- Log process under process log
- Stop usage

Please note that almost all machines at DTU Nanolab are equipped with a labmanager lock. More information on how to use LabManager and how the LabManager Lock (LM-lock) works can be found here or in the DTU Learn introductory course.

Shelf Space inside the Cleanroom

There is very limited space for storage of samples inside the cleanroom. Commonly each research group working in the cleanroom has been assigned shelf space for the group members to share. If you are not part of a research group, spaces are filled up, or you else require shelf space, please contact our administration or the Fabrication Support Team.