Specific Process Knowledge/Cleanroom Chemicals

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This page lists the chemicals that are made available in the cleanroom by Nanolab, covered by the cleanroom access hourly rate.

Acids, bases, and etchants

• Ammonia solution 28%. Stored in D-3?
• Ammonium persulphate (Powder). Stored in D-3.
• BHF (Mixture of Ammonium fluoride, Ammonium bi fluoride, Hydroflouric acid). Stored in D-3.
• BOE 7:1 without surfactant (Mixture of Ammonium fluoride, Ammonium bifluoride, Hydroflouric acid). Stored in D-3.
• BOE 7:1 with surfactant (Mixture of Ammonium fluoride, Ammonium bifluoride, Hydroflouric acid). Stored in D-3.
• Boric acid. Stored in D-3?
• Chrome ETCH 18 (Mixture of Ceric ammonium nitrate, Perchloric acid, Nitric acid). Stored in Bx1.
• HF 5%. Stored in D-3?
• HF 40%. Stored in D-3?
• Hydrochloric acid 37%. Stored in D-3.
• Hydrogen peroxide 31%. Stored in D-3.
• Nitric acid 69%. Stored in D-3.
• Phosphoric acid 85%. Stored in D-3.
• Potassium hydroxide (Pellets). Stored in D-3.
• Potassium hydroxide 50%. Stored in D-3.
• Sulfamic acid. Stored in D-3?
• Sulfuric acid 96%. Stored in D-3.

Developers

• AR 600-546 (Amyl acetate). Stored in E-4
• AZ 351B (NaOH based with disodium tetraborate buffer). Stored in E-4.
• AZ 726 MIF (TMAH based with surfactants added for fast and homogeneous substrate wetting). Stored in E-4.
• mr-Dev 600 (PGMEA). Stored in Bx1. Or E-4?
• ZED-N50 (n-Amylacetate). Stored in E-4.

Resists

• AR-P 6200.09. Stored in E-4.
• AZ 4562. Stored in E-4, small bottle in E-5.
• AZ 5214E. Stored in E-4, small bottle in E-5.
• AZ nLOF 2020. Stored in E-4, small bottle in E-5.
• AZ MiR 701 (29cps). Stored in E-4, small bottle in E-5.
• DUV42S-6 (BARC for stepper). Stored in E-4.
• KRF M230Y 6cp. Stored in E-4.
• KRF M35G 27cp. Stored in E-4.
• SU-8 2005. Stored in C-1.
• SU-8 2035. Stored in C-1.
• SU-8 2075. Stored in C-1.

Solvents

• 2-Propanol "IPA". Stored in C-1, D-3, E-4.
• Acetone. Stored in C-1, D-3, E-4.
• Anisole. Stored in E-4.
• AR 600-71 (Mixture of Dioxolane, PGME). Stored in E-4.
• A-Thinner (Anisole). Stored in E-4.
• Ethanol. Stored in C-1, D-3, E-4.
• MIBK. Stored in E-4.
• PGMEA (available as mr-Dev 600). Stored in Bx1. Or E-4?
• Remover 1165 (NMP). Stored in D-3, E-4.

Other chemicals

• HMDS. Stored in E-4.

Missing from list?

• AP3000?
• APS-100 (Ammonium persulfate based copper etch)?
• AZ 400K (KOH based with Potassium borate buffer)?
• Ethyl Acetate?
• HSQ?
• Rinse T1100 (Mixture of Mesitylin, 1,2,4-Trimethylbenzene)?
• UVN2300?