Specific Process Knowledge/Lithography/Resist/UVresist: Difference between revisions
| Line 399: | Line 399: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!AZ 5214E | !AZ 5214E | ||
|2023-01-11<br>jehem | | | ||
<s>2023-01-11</s><br> | |||
2025-09-30<br>jehem | |||
|1.5 µm | |1.5 µm | ||
|70 mJ/cm<sup>2</sup> | | | ||
<s>70 mJ/cm<sup>2</sup></s><br> | |||
90 mJ/cm<sup>2</sup> | |||
|Single puddle, 60 s | |Single puddle, 60 s | ||
| | | | ||
Resolution: ~1.5 um | |||
|- | |- | ||