Specific Process Knowledge/Lithography/Resist/UVresist: Difference between revisions
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*High aspect ratio | *High aspect ratio | ||
*Resist thickness 1 µm to several 100 µm | *Resist thickness 1 µm to several 100 µm | ||
*Available in cleanroom: 2005, 2035, and 2075 | *Available in cleanroom: 2005, 2035, and 2075. Considering discontinuation of the SU-8 2000 series we need to move to another product SU8 3000 and SU8 XTF series. | ||
*New formulation will be available in cleanroom and tested: 3005 instead of 2005, 3035 instead of 2035, XTF75 instead of 2075 and new 3025. | |||
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Spray coater specific resist | Spray coater specific resist | ||