Specific Process Knowledge/Lithography/Resist/UVresist: Difference between revisions
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!rowspan="3"|AZ 5214E<br><span style="color:red"> | !rowspan="3"|AZ 5214E<br><span style="color:red">Data from discontinued German version</span> | ||
|Long ago | |Long ago | ||
|1.5 µm | |1.5 µm | ||
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|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
!AZ 4562<br><span style="color:red"> | !AZ 4562<br><span style="color:red">Data from discontinued German version</span> | ||
|Long ago | |Long ago | ||
|10 µm | |10 µm | ||
| Line 315: | Line 315: | ||
|- | |- | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!rowspan="3"|AZ MiR 701<br><span style="color:red"> | !rowspan="3"|AZ MiR 701<br><span style="color:red">Data from discontinued PFOA containing version</span> | ||
|Long ago | |Long ago | ||
|1 µm | |1 µm | ||