Specific Process Knowledge/Lithography/Resist/UVresist: Difference between revisions
| Line 680: | Line 680: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!AZ MiR 701 | !AZ MiR 701 | ||
| 2023- | | 2023-06-30<br>jehem | ||
| 1.5 µm | | 1.5 µm | ||
| 405 | | 405 | ||
| Line 686: | Line 686: | ||
| Quality | | Quality | ||
| 175 mJ/cm<sup>2</sup> | | 175 mJ/cm<sup>2</sup> | ||
| | | 0 | ||
| 1 µm<br>Tested using dehydration reducing measures | | 1 µm<br>Tested using dehydration reducing measures | ||
| PEB: 60s@110°C<br>Dev: SP60s | | PEB: 60s@110°C<br>Dev: SP60s | ||
| Line 694: | Line 694: | ||
|-style="background:silver; color:black" | |-style="background:silver; color:black" | ||
!AZ nLOF 2020 | !AZ nLOF 2020 | ||
| 2023- | | 2023-06-30<br>jehem | ||
| 2.0 µm | | 2.0 µm | ||
| 405 | | 405 | ||
| Line 700: | Line 700: | ||
| Quality | | Quality | ||
| 9000 mJ/cm<sup>2</sup> | | 9000 mJ/cm<sup>2</sup> | ||
| | | 2 | ||
| 1 µm | | 1 µm | ||
| | | | ||
| Line 711: | Line 711: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!AZ 5214E | !AZ 5214E | ||
| 2023- | | 2023-06-30<br>jehem | ||
| 1.5 µm | | 1.5 µm | ||
| 405 | | 405 | ||
| Line 717: | Line 717: | ||
| Quality | | Quality | ||
| 75 mJ/cm<sup>2</sup> | | 75 mJ/cm<sup>2</sup> | ||
| | | 0 | ||
| 1 µm | | 1 µm | ||
| Dev: SP60s | | Dev: SP60s | ||
| Line 725: | Line 725: | ||
|-style="background:silver; color:black" | |-style="background:silver; color:black" | ||
!AZ 5214E<br>Image reversal | !AZ 5214E<br>Image reversal | ||
| 2023- | | 2023-06-30<br>jehem | ||
| 2.2 µm | | 2.2 µm | ||
| 405 | | 405 | ||
| Line 731: | Line 731: | ||
| Quality | | Quality | ||
| 50 mJ/cm<sup>2</sup> | | 50 mJ/cm<sup>2</sup> | ||
| | | 0 | ||
| 1 µm | | 1 µm | ||
| | | | ||
| Line 742: | Line 742: | ||
|-style="background:whitesmoke; color:black" | |-style="background:whitesmoke; color:black" | ||
!AZ 4562 | !AZ 4562 | ||
| 2023- | | 2023-06-30<br>jehem | ||
| 10 µm | | 10 µm | ||
| 405 | | 405 | ||
| Line 748: | Line 748: | ||
| Quality | | Quality | ||
| 550 mJ/cm<sup>2</sup> | | 550 mJ/cm<sup>2</sup> | ||
| | | 3 | ||
| ≤5 µm | | ≤5 µm | ||
| | | | ||