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Specific Process Knowledge/Lithography/Resist/UVresist: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
1,931 edits
Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
1,931 edits
Line 553: Line 553:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!rowspan="2"| AZ MiR 701
!rowspan="2"| AZ MiR 701
|rowspan="2"| 2023-03-21<br>jehem
|rowspan="2"| Not tested yet
|rowspan="2"| 1.5 µm
|rowspan="2"| 1.5 µm
|rowspan="2"| 375
|rowspan="2"| 375
| Optical
| Optical
|rowspan="2"| Quality
|rowspan="2"| Quality
|rowspan="2"| 415 mJ/cm<sup>2</sup>
|rowspan="2"| ? mJ/cm<sup>2</sup>
| 6
| ?
|rowspan="2"| 1 µm<br>Tested using dehydration reducing measures
|rowspan="2"| ? µm<br>Tested using dehydration reducing measures
|rowspan="2"|  
|rowspan="2"|  
PEB: 60s @ 110°C<br>
PEB: 60s @ 110°C<br>
Line 566: Line 566:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
| Pneumatic
| Pneumatic
| 2
| ?
|-
|-


Line 572: Line 572:
|-style="background:silver; color:black"
|-style="background:silver; color:black"
!rowspan="2"| AZ nLOF 2020
!rowspan="2"| AZ nLOF 2020
|rowspan="2"| 2023-03-21<br>jehem
|rowspan="2"| Not tested yet
|rowspan="2"| 2.0 µm
|rowspan="2"| 2.0 µm
|rowspan="2"| 375
|rowspan="2"| 375
| Optical
| Optical
|rowspan="2"| Quality
|rowspan="2"| Quality
|rowspan="2"| 700 mJ/cm<sup>2</sup>
|rowspan="2"| ? mJ/cm<sup>2</sup>
| 6
| ?
|rowspan="2"| 1.5 µm
|rowspan="2"| ? µm
|rowspan="2"|
|rowspan="2"|
PEB: 60s @ 110°C<br>
PEB: 60s @ 110°C<br>
Line 585: Line 585:
|-style="background:silver; color:black"
|-style="background:silver; color:black"
| Pneumatic
| Pneumatic
| 2
| ?
|-
|-


Line 591: Line 591:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!rowspan="2"| AZ 5214E
!rowspan="2"| AZ 5214E
|rowspan="2"| 2023-03-21<br>jehem
|rowspan="2"| 2023-04-04<br>jehem
|rowspan="2"| 1.5 µm
|rowspan="2"| 1.5 µm
|rowspan="2"| 375
|rowspan="2"| 375
| Optical
| Optical
|rowspan="2"| Quality
|rowspan="2"| Quality
|rowspan="2"| 120 mJ/cm<sup>2</sup>
|rowspan="2"| 110 mJ/cm<sup>2</sup>
| 6
| 0
|rowspan="2"| 1 µm
|rowspan="2"| 1 µm
|rowspan="2"| Dev: SP60s
|rowspan="2"| Dev: SP60s
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
| Pneumatic
| Pneumatic
| 2
| ?
|-
|-


Line 608: Line 608:
|-style="background:silver; color:black"
|-style="background:silver; color:black"
!rowspan="2"| AZ 5214E<br>image reversal
!rowspan="2"| AZ 5214E<br>image reversal
|rowspan="2"| 2023-03-21<br>jehem
|rowspan="2"| Not tested yet
|rowspan="2"| 2.2 µm
|rowspan="2"| 2.2 µm
|rowspan="2"| 375
|rowspan="2"| 375
| Optical
| Optical
|rowspan="2"| Quality
|rowspan="2"| Quality
|rowspan="2"| 45 mJ/cm<sup>2</sup>
|rowspan="2"| ? mJ/cm<sup>2</sup>
| 6
| ?
|rowspan="2"| 1.5 µm
|rowspan="2"| ? µm
|rowspan="2"|  
|rowspan="2"|  
Reversal bake: 60s @ 110°C<br>
Reversal bake: 60s @ 110°C<br>
Line 622: Line 622:
|-style="background:silver; color:black"
|-style="background:silver; color:black"
| Pneumatic
| Pneumatic
| 2
| ?
|-
|-


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