Specific Process Knowledge/Lithography/Resist/UVresist: Difference between revisions
| Line 548: | Line 548: | ||
| 10 µm | | 10 µm | ||
| Fast | | Fast | ||
| | | 1050 mJ/cm<sup>2</sup> | ||
| | | -1 | ||
| | | ≤5 µm | ||
| | | | ||
Priming: HMDS<BR> | Priming: HMDS<BR> | ||
| Line 548: | Line 548: | ||
| 10 µm | | 10 µm | ||
| Fast | | Fast | ||
| | | 1050 mJ/cm<sup>2</sup> | ||
| | | -1 | ||
| | | ≤5 µm | ||
| | | | ||
Priming: HMDS<BR> | Priming: HMDS<BR> | ||