Specific Process Knowledge/Lithography/Resist/UVresist: Difference between revisions
Appearance
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!AZ MiR 701 | !AZ MiR 701<br>jehem | ||
| 2023-04-04 | | 2023-04-04 | ||
| 1.5 µm | | 1.5 µm | ||