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| Line 496: |
Line 496: |
| |- | | |- |
| |-style="background:WhiteSmoke; color:black" | | |-style="background:WhiteSmoke; color:black" |
| !rowspan="2"| AZ 5214E<br><span style="color:red">Old German version</span> | | !AZ MiR 701 |
| | 2021-08-19 | | | 2023-04-04 |
| | 1.5 µm | | | 1.5 µm |
| | Fast | | | Fast |
| | 80 mJ/cm<sup>2</sup> | | | 305 mJ/cm<sup>2</sup> |
| | -4
| |
| | 2 µm
| |
| | Dev: SP60s
| |
| | |
| |-style="background:WhiteSmoke; color:black"
| |
| | 2021-08-19
| |
| | 1.5 µm
| |
| | Quality
| |
| | 80 mJ/cm<sup>2</sup>
| |
| | -4
| |
| | 1.25 µm
| |
| | Dev: SP60s
| |
| |-
| |
| | |
| |-
| |
| |-style="background:silver; color:black"
| |
| !rowspan="2"| AZ 5214E image reversal<br><span style="color:red">Old German version</span>
| |
| | 2020-03-01
| |
| | 2.2 µm
| |
| | Fast
| |
| | 43 mJ/cm<sup>2</sup>
| |
| | 0 | | | 0 |
| | >2 µm (a lot of stitching)
| |
| | Reversal bake: 120s@110°C, Flood exposure: 200mJ/cm<sup>2</sup>, Dev: SP60s
| |
|
| |
| |-style="background:silver; color:black"
| |
| | 2021-08-25
| |
| | 2.2 µm
| |
| | Quality
| |
| | 26 mJ/cm<sup>2</sup>
| |
| | -4
| |
| | 1.75 µm
| |
| | Reversal bake: 120s@110°C, Flood exposure: 200mJ/cm<sup>2</sup>, Dev: SP60s
| |
| |-
| |
|
| |
| |-
| |
| |-style="background:WhiteSmoke; color:black"
| |
| !AZ MiR 701<br><span style="color:red">Old PFOA containing version</span>
| |
| | 2021-08-25
| |
| | 1.5 µm
| |
| | Fast
| |
| | 225 mJ/cm<sup>2</sup>
| |
| | -4
| |
| | 1.25 µm<br>Tested using dehydration reducing measures | | | 1.25 µm<br>Tested using dehydration reducing measures |
| | PEB: 60s@110°C, Dev: SP60s | | | PEB: 60s@110°C<br>Dev: SP60s |
| |- | | |- |
|
| |
|
| |- | | |- |
| |-style="background:silver; color:black" | | |-style="background:silver; color:black" |
| !rowspan="2"| AZ nLOF 2020 | | !AZ nLOF 2020 |
| | 2020-02-01 | | | 2023-04-04 |
| | 2.0 µm | | | 2.0 µm |
| | Fast | | | Fast |
| | 300 mJ/cm<sup>2</sup> | | | 160 mJ/cm<sup>2</sup> |
| | 0 | | | -3 |
| | 2 µm (due to stitching) | | | 1.5 µm |
| | PEB: 60s@110°C, Dev: SP60s | | | PEB: 60s@110°C<br>Dev: SP60s |
| | |
| |-style="background:silver; color:black"
| |
| | 2020-03-01
| |
| | 2.0 µm
| |
| | Quality
| |
| | 180-200 mJ/cm<sup>2</sup>
| |
| | 0
| |
| | 1 µm
| |
| | PEB: 60s@110°C, Dev: SP60s
| |
| |- | | |- |
|
| |
|
| |- | | |- |
| |-style="background:WhiteSmoke; color:black" | | |-style="background:WhiteSmoke; color:black" |
| !AZ 5214E<br><span style="color:green">New Japanese version</span> | | !AZ 5214E |
| | 2023-01-06 | | | 2023-04-04 |
| | 1.5 µm | | | 1.5 µm |
| | Fast | | | Fast |
| | 80 mJ/cm<sup>2</sup> | | | 95 mJ/cm<sup>2</sup> |
| | -2 | | | -3 |
| | 1.75 µm | | | 2.0 µm |
| | Dev: SP60s | | | Dev: SP60s |
| |- | | |- |
| Line 583: |
Line 532: |
| |- | | |- |
| |-style="background:silver; color:black" | | |-style="background:silver; color:black" |
| !AZ 5214E image reversal<br><span style="color:green">New Japanese version</span> | | !AZ 5214E image reversal |
| | 2023-01-11 | | | 2023-04-04 |
| | 2.2 µm | | | 2.2 µm |
| | Fast | | | Fast |
| | 42 mJ/cm<sup>2</sup> | | | 20 mJ/cm<sup>2</sup> |
| | -2 | | | -2 |
| | 1.75 µm | | | 2.0 µm |
| | Reversal bake: 60s@110°C, Flood exposure: 500mJ/cm<sup>2</sup>, Dev: SP60s | | | Reversal bake: 60s@110°C,<br>Flood exposure: 500mJ/cm<sup>2</sup><br>Dev: SP60s |
| |-
| |
| | |
| |-
| |
| |-style="background:WhiteSmoke; color:black"
| |
| !AZ MiR 701<br><span style="color:green">New PFOA free version</span>
| |
| | 2021-08-25
| |
| | 1.5 µm
| |
| | Fast
| |
| | 225 mJ/cm<sup>2</sup>
| |
| | -4
| |
| | 1.25 µm (due to stitching)<br>Tested using dehydration reducing measures
| |
| | PEB: 60s@110°C, Dev: SP60s
| |
| |- | | |- |
|
| |
|
| |- | | |- |
| |-style="background:silver; color:black" | | |-style="background:silver; color:black" |
| !AZ 4562<br><span style="color:green">New Japanese version</span> | | !AZ 4562 |
| | 2021-12-07 | | | 2021-12-07 |
| | 10 µm | | | 10 µm |
