Specific Process Knowledge/Lithography/Resist/UVresist: Difference between revisions
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===Aligner: Maskless 01=== | ===Aligner: Maskless 01=== | ||
The Aligner: Maskless 01 has a 365 nm LED light source with a FWHM of 8 nm. | The Aligner: Maskless 01 has a 365 nm LED light source with a FWHM of 8 nm. | ||
'''New resists'''<br> | |||
As of 2023-03-21 we no longer have any of the old versions of the resists: AZ 5214E, AZ 4562, AZ MiR 701. The following table contains only information about the new resist versions. | |||
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