Specific Process Knowledge/Lithography/Resist/UVresist: Difference between revisions
Appearance
| Line 159: | Line 159: | ||
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! scope=row| Resist | ! scope=row| Resist | ||
! AZ 5214E | ! style="width: 15%;"| AZ 5214E | ||
! AZ MIR 701 | ! style="width: 15%;"| AZ MIR 701 | ||
! AZ nLOF 2020 | ! style="width: 15%;"| AZ nLOF 2020 | ||
! AZ 4562 | ! style="width: 15%;"| AZ 4562 | ||
! SU-8 | ! style="width: 15%;"| SU-8 | ||
! Ti Spray | ! style="width: 15%;"| Ti Spray | ||
|- | |- | ||
! scope=row| Maskless aligner | ! scope=row| Maskless aligner | ||