Specific Process Knowledge/Lithography/Resist/UVresist: Difference between revisions
Appearance
| Line 84: | Line 84: | ||
Manual coaters:<br> | Manual coaters:<br> | ||
*Spin coater: RCD8 | *Spin coater: RCD8 | ||
or | |||
*Spin coater: Labspin 2 | |||
*Spin coater: Labspin 3 | |||
| | | | ||
Spray coater | Spray coater | ||