Specific Process Knowledge/Lithography: Difference between revisions
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'''<big>UV Exposure</big>''' | '''<big>UV Exposure</big>''' | ||
*[http://labadviser.danchip.dtu.dk/images/c/ce/Litho_Tool_Package_-_3_Exposure_TARAN.pdf Slides on UV exposure] | *[http://labadviser.danchip.dtu.dk/images/c/ce/Litho_Tool_Package_-_3_Exposure_TARAN.pdf Slides on UV exposure] | ||
*[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=339 Training Video: UV Mask Aligner]''' | *[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=339 Training Video: UV Mask Aligner]''' | ||
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part1_operation-720p.mp4 Training Video: UV Mask Aligner Part I (Operation)] | *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part1_operation-720p.mp4 Training Video: UV Mask Aligner Part I (Operation)] | ||
*[ | *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part2_aligning-720p.mp4 Training Video: UV Mask Aligner Part II (Alignment)] | ||
*[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/UVExposure_Dose Information on UV Exposure Dose] | *[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/UVExposure_Dose Information on UV Exposure Dose] | ||