Specific Process Knowledge/Lithography: Difference between revisions
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*[http://www.microchemicals.com/downloads/application_notes.html Application Notes from MicroChemicals] | *[http://www.microchemicals.com/downloads/application_notes.html Application Notes from MicroChemicals] | ||
*[http://www.microchemicals.com/support/troubleshooter.html Lithography Troubleshooter from MicroChemicals] | *[http://www.microchemicals.com/support/troubleshooter.html Lithography Troubleshooter from MicroChemicals] | ||
*[http://www.cnf.cornell.edu/cnf_spietoc.html Handbook of Microlithography, Micromachining, and Microfabrication, Chapter 2: E-beam Lithography] | |||
*[http://onlinelibrary.wiley.com/doi/10.1002/9781118557662.ch3/summary Stefan Landis,Lithography, Chapter 3: E-beam Lithography] | |||
'''<big>Training</big>''' | '''<big>Training</big>''' | ||
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*[[Specific_Process_Knowledge/Lithography/EBeamLithography/JEOL_JBX-9500FSZ#Getting_started|Training on JEOL JBX-9500FSZ]] | *[[Specific_Process_Knowledge/Lithography/EBeamLithography/JEOL_JBX-9500FSZ#Getting_started|Training on JEOL JBX-9500FSZ]] | ||
*[[:Media:E-beam Lithography Lecture Tine Greibe 2015.pdf|Slides on E-beam Lithography]] | *[[:Media:E-beam Lithography Lecture Tine Greibe 2015.pdf|Slides on E-beam Lithography]] | ||