Specific Process Knowledge/Lithography: Difference between revisions
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'''<big>[[Specific Process Knowledge/Lithography/Coaters|Coaters]]</big>''' | '''<big>[[Specific Process Knowledge/Lithography/Coaters|Coaters]]</big>''' | ||
*[[Specific_Process_Knowledge/Lithography/Coaters#Spin_Coater:_Gamma_UV|Spin Coater: Gamma UV]] | |||
*[[Specific Process Knowledge/Lithography/Coaters#SSE Spinner|SSE Spinner]] | *[[Specific Process Knowledge/Lithography/Coaters#SSE Spinner|SSE Spinner]] | ||
*[[Specific Process Knowledge/Lithography/Coaters#Spin Track 1 + 2|Spin Track 1 + 2]] | *[[Specific Process Knowledge/Lithography/Coaters#Spin Track 1 + 2|Spin Track 1 + 2]] | ||
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'''<big>[[Specific Process Knowledge/Lithography/UVExposure|UV Exposure]]</big>''' | '''<big>[[Specific Process Knowledge/Lithography/UVExposure|UV Exposure]]</big>''' | ||
*[[Specific Process Knowledge/Lithography/UVExposure#KS Aligner|KS Aligner]] | *[[Specific Process Knowledge/Lithography/UVExposure#KS Aligner|KS Aligner]] | ||
*[[Specific Process Knowledge/Lithography/UVExposure#KS Aligner|Aligner: MA6-2]] | |||
*[[Specific Process Knowledge/Lithography/UVExposure#Aligner-6inch|Aligner-6inch]] | *[[Specific Process Knowledge/Lithography/UVExposure#Aligner-6inch|Aligner-6inch]] | ||
*[[Specific Process Knowledge/Lithography/UVExposure#III-V Aligner|III-V Aligner]] | *[[Specific Process Knowledge/Lithography/UVExposure#III-V Aligner|III-V Aligner]] | ||