Specific Process Knowledge/Lithography: Difference between revisions
Appearance
| Line 240: | Line 240: | ||
* Cleanroom safety course at DTU Danchip | * Cleanroom safety course at DTU Danchip | ||
* Wet Chemistry Course at DTU Danchip, | * Wet Chemistry Course at DTU Danchip, | ||
* Training videos of spin coating ( | * Training videos of spin coating (automatic and manual), exposure, and development (automatic and manual). The training videos can be found below. | ||
''' Course Responsible:''' The Lithography Group at DTU Danchip: sign up for the course by emailing to lithography@danchip.dtu.dk. | ''' Course Responsible:''' The Lithography Group at DTU Danchip: sign up for the course by emailing to lithography@danchip.dtu.dk. | ||
| Line 252: | Line 252: | ||
'''Literature''' | '''Literature''' | ||
See list of literature below. Also, find training videos and slides from the | See list of literature below. Also, find training videos and slides from the lecture below. | ||