Specific Process Knowledge/Lithography: Difference between revisions
| Line 125: | Line 125: | ||
*4 small samples (20mm, 12mm, 8mm, 4mm) | *4 small samples (20mm, 12mm, 8mm, 4mm) | ||
*6 wafers of 50 mm in size | *6 wafers of 50 mm in size | ||
* | *3 wafers of 100 mm in size | ||
*1 wafer of 150 mm in size | *1 wafer of 150 mm in size | ||
Only one cassette can be loaded at time | Only one cassette can be loaded at time | ||