Specific Process Knowledge/Lithography: Difference between revisions
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*[http://www.microchemicals.com/downloads/application_notes.html Application Notes from MicroChemicals] | *[http://www.microchemicals.com/downloads/application_notes.html Application Notes from MicroChemicals] | ||
*[http://www.microchemicals.com/support/troubleshooter.html Lithography Troubleshooter from MicroChemicals] | *[http://www.microchemicals.com/support/troubleshooter.html Lithography Troubleshooter from MicroChemicals] | ||
'''<big>Training</big>''' | |||
*[[Specific Process Knowledge/Lithography/Tool_Package_Training|Lithography Tool Package Training]] | |||
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*[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=362 Training Video: Manual Spin Coater]''' | *[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=362 Training Video: Manual Spin Coater]''' | ||
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'''<big>UV Exposure</big>''' | '''<big>UV Exposure</big>''' | ||
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*[[Specific_Process_Knowledge/Lithography/UVExposure_Dose|Information on UV Exposure Dose]] | *[[Specific_Process_Knowledge/Lithography/UVExposure_Dose|Information on UV Exposure Dose]] | ||
'''<big>Electron Beam Exposure</big>''' | '''<big>Electron Beam Exposure</big>''' | ||
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*[[Specific Process Knowledge/Lithography/Pretreatment#HMDS|HMDS]] | *[[Specific Process Knowledge/Lithography/Pretreatment#HMDS|HMDS]] | ||
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'''<big>Development</big>''' | '''<big>Development</big>''' | ||
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*[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=324 Training Video: Manual Puddle Developer]''' | *[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=324 Training Video: Manual Puddle Developer]''' | ||
'''<big>Post-Processing</big>''' | '''<big>Post-Processing</big>''' | ||