Specific Process Knowledge/Lithography/Resist/UVresist: Difference between revisions
Appearance
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!rowspan="2"| AZ 5214E | !rowspan="2"| AZ 5214E | ||
|rowspan="2"| 2024-12-09<br>taran | |rowspan="2"| 2024-12-09<br>taran | ||
|rowspan="2"| 1. | |rowspan="2"| 1.25 µm | ||
|rowspan="2"| 375 | |rowspan="2"| 375 | ||
| Optical | | Optical | ||