Specific Process Knowledge/Lithography: Difference between revisions
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DTU Danchip offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipments, as well as training in equipment operation and processing in the cleanroom. The course is recommended for all users that intend to perform any lithographic processing in the cleanroom. | DTU Danchip offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipments, as well as training in equipment operation and processing in the cleanroom. The course is recommended for all users that intend to perform any lithographic processing in the cleanroom. | ||
'''Schedule:''' | '''Schedule:''' | ||
'''Location:''' Meeting room bulding 347 at DTU Danchip and in cleanroom facilities at DTU Danchip | The tool package consists of a lecture and a one-day training session in the cleanroom. | ||
*Lecture once a month (~3.5 hours) | |||
*Training session once a week, max. 6 persons per session (9:00 - 16:00) | |||
'''Location:''' | |||
Meeting room bulding 347 at DTU Danchip and in cleanroom facilities at DTU Danchip | |||
'''Qualified Prerequisites:''' | '''Qualified Prerequisites:''' | ||
* Cleanroom safety course at DTU Danchip | * Cleanroom safety course at DTU Danchip | ||
* Wet Chemistry Course at DTU Danchip | * Wet Chemistry Course at DTU Danchip | ||
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* Study the equipment manuals. The manuals are available in LabManager. | * Study the equipment manuals. The manuals are available in LabManager. | ||
''' Course Responsible:''' The Lithography Group at DTU Danchip: sign up for the course by emailing to lithography@danchip.dtu.dk. | ''' Course Responsible:''' | ||
The Lithography Group at DTU Danchip: sign up for the course by emailing to lithography@danchip.dtu.dk. | |||
''' Learning Objectives:''' | |||
* Describe fundamental parts of lithographic processing in a cleanroom, design of process flows | * Describe fundamental parts of lithographic processing in a cleanroom, design of process flows | ||
* Authorization to use spin coater, mask aligner, and developer at DTU Danchip | * Authorization to use spin coater, mask aligner, and developer at DTU Danchip | ||
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* Analyze and apply your results of lithographic processing | * Analyze and apply your results of lithographic processing | ||
'''Literature''' | '''Literature:''' | ||
See list of literature below. Also, find training videos and slides from the lecture below. | See list of literature below. Also, find training videos and slides from the lecture below. | ||
{| style="color: black;" width="90%" | {| style="color: black;" width="90%" | ||
| colspan="3" | | | colspan="3" | | ||