Specific Process Knowledge/Lithography: Difference between revisions
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* Cleanroom safety course at DTU Danchip | * Cleanroom safety course at DTU Danchip | ||
* Wet Chemistry Course at DTU Danchip | * Wet Chemistry Course at DTU Danchip | ||
'''Preparations''' | '''Preparations:''' | ||
* Read Sami Franssila "" (2010), Chapter 9: Optical Lithography. | * Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography. (Available online from DTU campus, see link below) | ||
* See training videos of spin coating (automatic and manual), exposure (operation and alignment), and development (automatic and manual). The training videos can be found below. | * See training videos of spin coating (automatic and manual), exposure (operation and alignment), and development (automatic and manual). The training videos can be found below. | ||
* Study the equipment manuals. The manuals are available in LabManager | * Study the equipment manuals. The manuals are available in LabManager. | ||
''' Course Responsible:''' The Lithography Group at DTU Danchip: sign up for the course by emailing to lithography@danchip.dtu.dk. | ''' Course Responsible:''' The Lithography Group at DTU Danchip: sign up for the course by emailing to lithography@danchip.dtu.dk. | ||