Specific Process Knowledge/Lithography: Difference between revisions
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'''Qualified Prerequisites:''' | '''Qualified Prerequisites:''' | ||
* Cleanroom safety course at DTU Danchip | * Cleanroom safety course at DTU Danchip | ||
* Wet Chemistry Course at DTU Danchip, | * Wet Chemistry Course at DTU Danchip | ||
* | '''Preparations''' | ||
* Read Sami Franssila "" (2010), Chapter 9: Optical Lithography. | |||
* See training videos of spin coating (automatic and manual), exposure (operation and alignment), and development (automatic and manual). The training videos can be found below. | |||
* Study the equipment manuals. The manuals are available in LabManager | |||
''' Course Responsible:''' The Lithography Group at DTU Danchip: sign up for the course by emailing to lithography@danchip.dtu.dk. | ''' Course Responsible:''' The Lithography Group at DTU Danchip: sign up for the course by emailing to lithography@danchip.dtu.dk. | ||
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'''Literature''' | '''Literature''' | ||
See list of literature below. Also, find training videos and slides from the lecture | See list of literature below. Also, find training videos and slides from the lecture below. | ||
{| style="color: black;" width="90%" | {| style="color: black;" width="90%" | ||
| colspan="3" | | | colspan="3" | | ||