Specific Process Knowledge/Lithography: Difference between revisions

@@ Line 179: / Line 179: @@
 *[[Specific Process Knowledge/Lithography/Coaters#Spin coater: Manual Labspin|Spin coater: Manual Labspin]]
 *[[Specific_Process_Knowledge/Lithography/Coaters/SprayCoater|Spray Coater]]
+'''<big>[[Specific Process Knowledge/Lithography/Baking|Baking]]</big>'''
+*[[Specific Process Knowledge/Lithography/Baking#Hotplates|Hotplates]]
+*[[Specific Process Knowledge/Lithography/Baking#Ovens|Ovens]]
 | style="width: 20%"|
@@ Line 194: / Line 198: @@
 *[[Specific Process Knowledge/Lithography/DUVStepper#DUV Stepper FPA-3000EX4 from Canon|DUV Stepper FPA-3000EX4 from Canon]]
-'''<big>[[Specific Process Knowledge/Lithography/Baking|Baking]]</big>'''
-*[[Specific Process Knowledge/Lithography/Baking#Hotplates|Hotplates]]
-*[[Specific Process Knowledge/Lithography/Baking#Ovens|Ovens]]
-| style="width: 20%"|
 '''<big>[[Specific Process Knowledge/Lithography/Development|Development]]</big>'''
 *[[Specific Process Knowledge/Lithography/Development#Developer-1 and Developer-2|Developer-1 and Developer-2]]
@@ Line 206: / Line 205: @@
 *[[Specific_Process_Knowledge/Lithography/Development#Developer_TMAH_UV-lithography|Developer TMAH UV-lithography]]
+| style="width: 20%"|
 '''<big>[[Specific Process Knowledge/Lithography/Strip|Strip]]</big>'''
 *[[Specific Process Knowledge/Lithography/Strip#Plasma Asher 1|Plasma Asher 1]]