Specific Process Knowledge/Lithography: Difference between revisions
Appearance
| Line 231: | Line 231: | ||
DTU Danchip offers a Tool Package Training in Lithography; the course includes theory on lithographic process and equipment, as well as training in equipment operation and processing in the cleanroom. The course is recommended for all users that intend to perform any lithographic processing in the cleanroom. | DTU Danchip offers a Tool Package Training in Lithography; the course includes theory on lithographic process and equipment, as well as training in equipment operation and processing in the cleanroom. The course is recommended for all users that intend to perform any lithographic processing in the cleanroom. | ||
''' Lithography Tool Package Training''' | ''' Lithography Tool Package Training''' | ||
Schedule: The tool package consists of a ~3.5 hour lecture and a one-day training session in the cleanroom. | '''Schedule:''' The tool package consists of a ~3.5 hour lecture and a one-day training session in the cleanroom. | ||
Location: Meeting room bulding 347 at DTU Danchip and in cleanroom facilities at DTU Danchip | '''Location:''' Meeting room bulding 347 at DTU Danchip and in cleanroom facilities at DTU Danchip | ||
Qualified Prerequisites: | '''Qualified Prerequisites:''' | ||
* Cleanroom safety course at DTU Danchip | * Cleanroom safety course at DTU Danchip | ||
* Wet Chemistry Course at DTU Danchip, | * Wet Chemistry Course at DTU Danchip, | ||
* Training videos of spin coating (Automatic and manual), exposure, and development (automatic and manual). The training videos can be found below. | * Training videos of spin coating (Automatic and manual), exposure, and development (automatic and manual). The training videos can be found below. | ||
Responsible: The Lithography Group at DTU Danchip: sign up for the course by emailing to lithography@danchip.dtu.dk. | ''' Course Responsible:''' The Lithography Group at DTU Danchip: sign up for the course by emailing to lithography@danchip.dtu.dk. | ||
''' Learning Objectives''' | ''' Learning Objectives''' | ||