Specific Process Knowledge/Lithography: Difference between revisions
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*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch9/pdf Franssila, 2010, Chapter 9: Optical Lithography] | *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch9/pdf Franssila, 2010, Chapter 9: Optical Lithography] | ||
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch10/pdf Franssila, 2010, Chapter 10: Advanced Lithography] | *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch10/pdf Franssila, 2010, Chapter 10: Advanced Lithography] | ||
*[http://labadviser.danchip.dtu.dk/images/a/ac/Litho_Tool_Package_-_2_Spin_coating_v8_LESJO_%28TARAN_ed%29.pdf TPT slides: Introduction] | |||
*[http://www.microchemicals.com/support/troubleshooter.html Lithography Troubleshooter from MicroChemicals] | *[http://www.microchemicals.com/support/troubleshooter.html Lithography Troubleshooter from MicroChemicals] | ||
*[http://www.microchemicals.com/downloads/application_notes.html Application Notes from MicroChemicals] | *[http://www.microchemicals.com/downloads/application_notes.html Application Notes from MicroChemicals] | ||
*[http://www.cnf.cornell.edu/cnf_spietoc.html Handbook of Microlithography, Micromachining, and Microfabrication, Chapter 2: E-beam Lithography] | *[http://www.cnf.cornell.edu/cnf_spietoc.html Handbook of Microlithography, Micromachining, and Microfabrication, Chapter 2: E-beam Lithography] | ||
*[http://onlinelibrary.wiley.com/doi/10.1002/9781118557662.ch3/summary Stefan Landis,Lithography, Chapter 3: E-beam Lithography] | *[http://onlinelibrary.wiley.com/doi/10.1002/9781118557662.ch3/summary Stefan Landis,Lithography, Chapter 3: E-beam Lithography] | ||
'''<big>Spin Coating</big>''' | '''<big>Spin Coating</big>''' | ||
*[http://labadviser.danchip.dtu.dk/images/a/ac/Litho_Tool_Package_-_2_Spin_coating_v8_LESJO_%28TARAN_ed%29.pdf | *[http://labadviser.danchip.dtu.dk/images/a/ac/Litho_Tool_Package_-_2_Spin_coating_v8_LESJO_%28TARAN_ed%29.pdf TPT slides: Spin Coating] | ||
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.055_Spin_Coater_GAMMA_UV-720p.mp4 Training Video: Automatic Spin Coater]''' | *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.055_Spin_Coater_GAMMA_UV-720p.mp4 Training Video: Automatic Spin Coater]''' | ||
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.057_Manual_Spin_Coater-720p.mp4 Training Video: Manual Spin Coater]''' | *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.057_Manual_Spin_Coater-720p.mp4 Training Video: Manual Spin Coater]''' | ||
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'''<big>UV Exposure</big>''' | '''<big>UV Exposure</big>''' | ||
*[http://labadviser.danchip.dtu.dk/images/c/ce/Litho_Tool_Package_-_3_Exposure_TARAN.pdf | *[http://labadviser.danchip.dtu.dk/images/c/ce/Litho_Tool_Package_-_3_Exposure_TARAN.pdf TPT slides: UV Exposure] | ||
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part1_operation-720p.mp4 Training Video: UV Mask Aligner Part I (Operation)] | *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part1_operation-720p.mp4 Training Video: UV Mask Aligner Part I (Operation)] | ||
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part2_aligning-720p.mp4 Training Video: UV Mask Aligner Part II (Alignment)] | *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part2_aligning-720p.mp4 Training Video: UV Mask Aligner Part II (Alignment)] | ||
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'''<big>Development</big>''' | '''<big>Development</big>''' | ||
*[[:Media:Litho Tool Package - Development TARAN.pdf| | *[[:Media:Litho Tool Package - Development TARAN.pdf|TPT slides: Development]] | ||
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.050_Developer_TMAH_UV-Lithography-720p.mp4 Training Video: Automatic Puddle Developer]''' | *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.050_Developer_TMAH_UV-Lithography-720p.mp4 Training Video: Automatic Puddle Developer]''' | ||
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.049_Developer_Manual-720p.mp4 Training Video: Manual Puddle Developer]''' | *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.049_Developer_Manual-720p.mp4 Training Video: Manual Puddle Developer]''' | ||
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'''<big>Inspection of Resist Patterns</big>''' | '''<big>Inspection of Resist Patterns</big>''' | ||
*[[:Media:Litho Tool Package - 8 Process effects and examples v4 TARAN.pdf| | *[[:Media:Litho Tool Package - 8 Process effects and examples v4 TARAN.pdf|TPT slides: Process Effects and Examples]] | ||
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