Specific Process Knowledge/Lithography: Difference between revisions
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'''<big>UV Exposure</big>''' | '''<big>UV Exposure</big>''' | ||
*[[: | *[[:Media:Litho Tool Package - Exposure TARAN.pdf|Link to slides on UV exposure]] | ||
*[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=339 Training Video: UV Exposure]''' | *[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=339 Training Video: UV Exposure]''' | ||
*[[Specific_Process_Knowledge/Lithography/UVExposure_Dose|Information on UV Exposure Dose]] | *[[Specific_Process_Knowledge/Lithography/UVExposure_Dose|Information on UV Exposure Dose]] | ||
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'''<big>Post-Processing</big>''' | '''<big>Post-Processing</big>''' | ||
*[[: | *[[:Media:Litho Tool Package - PostProcessing TARAN.pdf|Link to slides on post-processing]] | ||
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'''<big>UV Resists</big>''' | '''<big>UV Resists</big>''' | ||
*[[: | *[[:Media:Litho Tool Package - Resist TARAN.pdf|Link to slides on photoresist]] | ||
*[[Specific_Process_Knowledge/Lithography/UVLithography#Resist_Overview|UV Resist Overview]] | *[[Specific_Process_Knowledge/Lithography/UVLithography#Resist_Overview|UV Resist Overview]] | ||
'''<big>Inspection of Resist</big>''' | '''<big>Inspection of Resist</big>''' | ||
*[[: | *[[:Media:Litho Tool Package - Inspection v4 TARAN.pdf|Link to slides on inspection]] | ||