DTU Danchip offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom.
The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
For details, dates, and course material, please check the course description in Courses.
Lithography Tool Package Training
Schedule
Theoretical part
The lecture has been replaced by videos that can be viewed at one's leisure.
A 1 hour "questions and exercises" session once or twice a month will be planned as needed (typically Fridays 09:30-10:30).
NEXT "questions and exercises" sessions: 24th of March, 31st of March, 21st of April, 28th of April, 19th of May
Practical part
A 4-5 hour training session once a week, max. 4 persons per session (typically Wednesdays 09:00 - 14:00).
NEXT training sessions: 29th of March, 5th of April, 26th of April, 3rd of May, 24th of May
Location
Theoretical part
The location of the "questions and exercises" session will be specified after signing up for the course.
Practical part
The training session takes place inside the cleanroom. The meeting point will be in front of the first equipment.
Qualified Prerequisites
Cleanroom safety course at DTU Danchip
Admission to the cleanroom must be obtained before the training session
Preparations
Before the "questions and exercises" session
Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography. (Available online from DTU campus)
Watch the lecture videos (7 videos, 2:41 hours in total). Write down any questions that may arise during the videos.
Before training session
Watch the training videos of spin coating (automatic), exposure (operation, and alignment), and development (automatic).
Study the equipment manuals. The manuals are available in LabManager.
Study the TPT process flows (first print, and alignment).
Links to literature, lecture videos, training videos, equipment manuals, and process flows can be found in the "Knowledge and Information" section below.
