Specific Process Knowledge/Lithography/UVLithography: Difference between revisions
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=UV lithography= | |||
UV Lithography uses ultraviolet light to transfer a pattern from a photo-mask, or a digital design file, to a substrate coated with photoresist. | UV Lithography uses ultraviolet light to transfer a pattern from a photo-mask, or a digital design file, to a substrate coated with photoresist. | ||
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DTU Nanolab offers a number of automatic and manual coaters, mask or maskless exposure tools, as well as automatic or semi-automatic developers.<br clear=all /> | DTU Nanolab offers a number of automatic and manual coaters, mask or maskless exposure tools, as well as automatic or semi-automatic developers.<br clear=all /> | ||
= Getting started = | =Getting started= | ||
[[File:UVLPic1.png|450px|right]] | [[File:UVLPic1.png|450px|right]] | ||