Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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Please request training in E-Beam lithography by sending an email with your process flow to [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk]. | Please request training in E-Beam lithography by sending an email with your process flow to [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk]. | ||
==EBL staff at DTU Nanolab== | |||
{| class="wikitable" | |||
|+ Staff | |||
|- | |||
[[File:thope.png|400px]] || [[File:pxshi.png|400px]] || [[File:elelop.png|400px]] || [[File:meenadh.png|400px]] | |||
|- | |||
Thomas Pedersen || Peixiong Shi || Elena Lopez Aymerich || Meena Dhankhar | |||
|} | |||
== JEOL 9500 and Raith eLine Plus specifications == | == JEOL 9500 and Raith eLine Plus specifications == | ||