Specific Process Knowledge/Lithography/UVLithography: Difference between revisions
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===[[Specific Process Knowledge/Lithography/Resist/UVresist|UV Resist]]=== | ===[[Specific Process Knowledge/Lithography/Resist/UVresist|UV Resist]]=== | ||
===[[Specific Process Knowledge/Lithography/Pretreatment|Pretreatment]]=== | ===[[Specific Process Knowledge/Lithography/Pretreatment|Pretreatment]]=== | ||
===[[Specific Process Knowledge/Lithography/Coaters| | ===[[Specific Process Knowledge/Lithography/Coaters|Coating]]=== | ||
===[[Specific Process Knowledge/Lithography/Baking|Baking]]=== | |||
===[[Specific Process Knowledge/Lithography/UVExposure|UV Exposure]]=== | ===[[Specific Process Knowledge/Lithography/UVExposure|UV Exposure]]=== | ||
===[[Specific Process Knowledge/Lithography/Development|Development]]=== | ===[[Specific Process Knowledge/Lithography/Development|Development]]=== | ||
===[[Specific Process Knowledge/Lithography/Descum|Descum]]=== | ===[[Specific Process Knowledge/Lithography/Descum|Descum]]=== | ||
===[[Specific Process Knowledge/Lithography/LiftOff|Lift-off]]=== | |||
===[[Specific Process Knowledge/Lithography/Strip|Stripping Resist]]=== | ===[[Specific Process Knowledge/Lithography/Strip|Stripping Resist]]=== | ||
===Information from our suppliers=== | ===Information from our suppliers=== | ||
[https://www.microchemicals.com/downloads/application_notes.html Application notes] from MicroChemicals GmbH, e.g. [https://www.microchemicals.com/technical_information/lithography_trouble_shooting.pdf Lithography Trouble-Shooter] | [https://www.microchemicals.com/downloads/application_notes.html Application notes] from MicroChemicals GmbH, e.g. [https://www.microchemicals.com/technical_information/lithography_trouble_shooting.pdf Lithography Trouble-Shooter] | ||