Specific Process Knowledge/Lithography

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There are four different types of lithography available at DTU Nanolab:

• UV Lithography
• DUV Stepper Lithography
• E-beam Lithography
• Nano Imprint Lithography

Comparing lithography methods at DTU Nanolab

	UV Lithography	DUV Stepper Lithography	E-beam Lithography	Nano Imprint Lithography
Generel description	Pattern transfer via UltraViolet (UV) light	Pattern transfer via Deep UltraViolet (DUV) light	Patterning by electron beam	Pattern transfer via hot embossing (HE)
Pattern size range	Resist type, thickness, and pattern dependent ~0.6 µm and up	pattern type, shape and pitch dependent ~200 nm and up	~12 nm - 1 µm (and larger at high currents)	~20 nm and up
Resist type	UV sensitive: AZ 5214E, AZ 4562, AZ MiR 701 (positive) AZ 5214E, AZ nLOF 2020, SU-8 (negative)	DUV sensitive JSR KRF M230Y, JSR KRF M35G (positive) UVN2300-0.8 (negative)	E-beam sensitive AR-P6200 CSAR, ZEP502A , PMMA (positive) HSQ, mr-EBL, AR-N 7520 (negative)	Imprint polymers: Topas PMMA mr-I 7030R
Resist thickness range	~0.5µm to 200µm	~50nm to 2µm	~30nm to 1 µm	~ 100nm to 2µm
Typical exposure time	10s-3min pr. wafer using mask aligners. 10min-5hours pr. wafer using maskless aligners.	Process depended, depends on pattern, pattern area and dose. Throughput is up to 60 wafers/hour.	Depends on dose, Q [µC/cm2], beam current, I [A], and pattern area, A [cm2]: t = Q*A/I	Process depended, depends also on heating and cooling temperature rates
Substrate size	small samples, down to 3x3 mm2 50 mm wafers 100 mm wafers 150 mm wafers 200 mm wafers	100 mm wafers 150 mm wafers 200 mm wafers	We have cassettes that fit to 4 small samples (slit openings: 20mm, 12mm, 8mm, 4mm) 6 wafers of 50 mm in size 3 wafers of 100 mm in size 1 wafer of 150 mm in size 1 wafer of 200 mm in size Only one cassette can be loaded at a time	small samples 50 mm wafers 100 mm wafers 150 mm wafers
Allowed materials	Any standard cleanroom material	Any standard cleanroom material	Any standard cleanroom material, except materials that will degas and special treatment for graphene	Any standard cleanroom material

Equipment Pages

Resist UV Resist Overview DUV Resists E-beam resist Pretreatment HMDS BHF Oven 250C Drop Shape Analyzer Coating Spin Coater: Gamma UV Spin Coater: RCD8 Spin Coater: Labspin 02/03 Spray Coater Spin coater: Süss Stepper Spin Coater: Gamma e-beam & UV Baking Hotplates Ovens	UV Exposure KS Aligner Aligner: MA6-2 Inclined UV-lamp Aligner: Maskless 01 Aligner: Maskless 02 Aligner: Maskless 03 Deep-UV Exposure DUV Stepper (Canon FPA-3000EX4) Electron Beam Exposure E-Beam Writer 9500 (JEOL JBX-9500FSZ) Raith Elphy on SEM - LEO NanoImprint Lithography Molecular Vapour Deposition Imprinter 01	Development Developer: TMAH UV-lithography Developer: TMAH Manual Developer: SU8 Developer: TMAH Stepper Developer: E-beam Descum Plasma Asher 1 Plasma Asher 2 Plasma Asher 3:Descum BHF Lift-off Lift-off Strip Plasma Asher 1 Plasma Asher 2 Plasma Asher 3: Descum Resist Strip

Lithography Tool Package Training

DTU Nanolab offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment. After the TPT has been successfully completed, you can begin training on the lithography equipment at DTU Nanolab.

You are required to pass this course, in order to get access to using the lithography equipment inside the DTU Nanolab fabrication facility (The Cleanroom).

For details, dates, and course material, please check the course description under Courses.

Lithography Tool Package Training
Signing up for the course	The course is in DTU Learn. You sign up for the course by enroling yourself in the course "DTU Nanolab TPT: Lithography". Log into DTU Learn here: DTU Learn Select the menu "Discover" Search for "Nanolab" Select the course "DTU Nanolab TPT: Lithography" Press "Enroll in Course" You have now signed up for the course. Go to the course page in DTU Learn and choose "Course Content" and "Content" Watch the lecture videos, read the learning material, and complete all the quizzes.
Learning Objectives	Learn about the fundamentals of lithographic processing in a cleanroom: Coating Exposure Development Post-processing

Knowledge and Information about Lithography

Literature Franssila, 2010, Chapter 9: Optical Lithography Franssila, 2010, Chapter 10: Advanced Lithography Lithography Troubleshooter from MicroChemicals Application Notes from MicroChemicals Handbook of Microlithography, Micromachining, and Microfabrication, Chapter 2: E-beam Lithography Stefan Landis,Lithography, Chapter 3: E-beam Lithography Application notes from MicroChemicals GmbH, e.g. Lithography Trouble-Shooter Lecture videos Lithography TPT lecture videos (7 videos, 2:41 hours in total) on YouTube A full lecture series from a UT Austin course on microfabrication by "litho guru" Chris Mack. Half of the lectures are on (projection) lithography :-) Lithography TPT lecture slides TPT slides: Introduction TPT slides: Spin Coating TPT slides: UV Exposure TPT slides: Development TPT slides: Post-processing TPT slides: Process Effects and Examples	Training videos Training Video: Automatic Spin Coater Training Video: Manual Spin Coater Labspin Training Video: UV Mask Aligner Part I (Operation) Training Video: UV Mask Aligner Part II (Alignment) Training Video: Maskless aligner Training Video Training Video: Maskless aligner Conversion Training Video: Maskless aligner Series and Navigation Training Video: Maskless aligner Alignment Training Video: Automatic Puddle Developer Training Video: Manual Puddle Developer Playlists on YouTube: Lithography TPT training videos Maskless aligner training videos Manuals Automatic Spin Coater: Spin Coater: Gamma UV Manual Spin Coater: Spin Coater: Labspin 02 or Spin Coater: Labspin 03 UV Mask Aligner: Aligner: MA6 - 2 or KS Aligner Automatic Puddle Developer: Developer: TMAH UV-lithography Manual Puddle Developer: Developer: TMAH Manual Manual E-beam Developer: Developer: E-beam Manual	Process Flows TPT first print process flow TPT alignment process flow UV resist process flows E-beam resist process flows Resists UV Resist Overview (links to manufacturers, technical data, process flows, etc) DUV Resists E-beam Resist Overview UV Exposure Information on UV Exposure Dose Electron Beam Exposure Training on JEOL JBX-9500FSZ E-beam resists and process flows Lecture on E-beam Lithography Deep-UV Exposure Deep-UV Stepper Lithography