Specific Process Knowledge/Lithography: Difference between revisions
| Line 165: | Line 165: | ||
'''<big>Resist</big>''' | '''<big>Resist</big>''' | ||
*[[Specific_Process_Knowledge/Lithography/UVLithography#Resist_Overview|UV Resist Overview]] | *[[Specific_Process_Knowledge/Lithography/UVLithography#Resist_Overview|UV Resist Overview]] | ||
*DUV Resists | *[[http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/DUVStepperLithography#Process_information_2|DUV Resists]] | ||
*E-beam resists | *E-beam resists | ||