Specific Process Knowledge/Lithography/UVLithography: Difference between revisions
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|Plasma ashing can remove crosslinked SU-8 | |Plasma ashing can remove crosslinked SU-8 | ||
|[[media:Process_Flow_SU8_70um.docx|Process_Flow_SU8_70um.docx]] | |[[media:Process_Flow_SU8_70um.docx|Process_Flow_SU8_70um.docx]] | ||
Most of the process knowledge on SU-8 is based in research groups | |||
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