Specific Process Knowledge/Lithography/UVLithography: Difference between revisions
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[[Image:UVLithography.jpg|320x320px|right|frame|]] | [[Image:UVLithography.jpg|320x320px|right|frame|]] | ||
UV Lithography uses ultraviolet light to transfer a pattern from a mask to a wafer coated with photoresist. The photoresist film is spin coated on the wafers and the pattern is transferred to the wafer by using | UV Lithography uses ultraviolet light to transfer a pattern from a mask to a wafer coated with photoresist. The photoresist film is spin coated on the wafers and the pattern is transferred to the wafer by using an aligner. DTU Nanolab houses a number of automatic or manual coaters, mask or maskless aligners, as well as automatic or semi-automatic developers. | ||
= Getting started = | = Getting started = | ||