Specific Process Knowledge/Lithography: Difference between revisions
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<!--'''<span style="color: red;">OBS: The December Litho TPT has been cancelled due to sickness. Contact the Lithography Group for rescheduling if this poses a problem.</span>''' <span style="text-decoration: line-through;">'''NEXT LECTURE: Tuesday 29th of November 9:15 - 13:00 (B347, Seminar room)'''</span>--> | <!--'''<span style="color: red;">OBS: The December Litho TPT has been cancelled due to sickness. Contact the Lithography Group for rescheduling if this poses a problem.</span>''' <span style="text-decoration: line-through;">'''NEXT LECTURE: Tuesday 29th of November 9:15 - 13:00 (B347, Seminar room)'''</span>--> | ||
'''Theoretical part''' | '''Theoretical part''' | ||
* Lecture videos that can be viewed at one's leisure. | |||
* A 1 hour "questions and exercises" session | * A 1 hour "questions and exercises" session 2 times a month (typically Fridays 09:30-10:30). | ||
<!--* NEXT "questions and exercises" sessions: '''24th of March, 31st of March, 21st of April, 28th of April, 19th of May'''--> | <!--* NEXT "questions and exercises" sessions: '''24th of March, 31st of March, 21st of April, 28th of April, 19th of May'''--> | ||
'''Practical part''' | '''Practical part''' | ||
* A 4 | * A 3-4 hour training session 2 times a month, max. 4 persons per session (typically Wednesdays 09:00 - 12:30 or 10:00 - 13:30). | ||
<!--* NEXT training sessions: '''29th of March, 5th of April, 26th of April, 3rd of May, 24th of May'''--> | <!--* NEXT training sessions: '''29th of March, 5th of April, 26th of April, 3rd of May, 24th of May'''--> | ||
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* Cleanroom safety course at DTU Danchip | * Cleanroom safety course at DTU Danchip | ||
* Admission to the cleanroom must be obtained before the training session | * Admission to the cleanroom must be obtained before the training session | ||
* Theoretical part must be completed before the training session | |||
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* Watch the lecture videos (7 videos, 2:41 hours in total). Write down any questions that may arise during the videos. | * Watch the lecture videos (7 videos, 2:41 hours in total). Write down any questions that may arise during the videos. | ||
'''Before training session''' | '''Before training session''' | ||
* Complete the theoretical part (Q&E) | |||
* Watch the training videos of spin coating (automatic), exposure (operation, and alignment), and development (automatic). | * Watch the training videos of spin coating (automatic), exposure (operation, and alignment), and development (automatic). | ||
* Study the equipment manuals. The manuals are available in LabManager. | * Study the equipment manuals. The manuals are available in LabManager. | ||