Specific Process Knowledge/Lithography: Difference between revisions
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*3 wafers of 100 mm in size | *3 wafers of 100 mm in size | ||
*1 wafer of 150 mm in size | *1 wafer of 150 mm in size | ||
*1 wafer of 200 mm in size | |||
Only one cassette can be loaded at time | Only one cassette can be loaded at time | ||
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