Specific Process Knowledge/Lithography: Difference between revisions
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'''Before the "questions and exercises" session''' | '''Before the "questions and exercises" session''' | ||
* Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography. (Available online from DTU campus) | * Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography. (Available online from DTU campus) | ||
* Watch the lecture videos (7 videos, 2:41 hours in total). | * Watch the lecture videos (7 videos, 2:41 hours in total). Write down any questions that may arise during the videos. | ||
'''Before training session''' | '''Before training session''' | ||
* Watch the training videos of spin coating (automatic), exposure (operation, and alignment), and development (automatic). | * Watch the training videos of spin coating (automatic), exposure (operation, and alignment), and development (automatic). | ||