Jump to content

Specific Process Knowledge/Lithography: Difference between revisions

← Older editNewer edit →
VisualWikitext
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,531 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,531 edits
Line 227: Line 227:
|
|
<!--'''<span style="color: red;">OBS: The December Litho TPT has been cancelled due to sickness. Contact the Lithography Group for rescheduling if this poses a problem.</span>''' <span style="text-decoration: line-through;">'''NEXT LECTURE: Tuesday 29th of November 9:15 - 13:00 (B347, Seminar room)'''</span>-->
<!--'''<span style="color: red;">OBS: The December Litho TPT has been cancelled due to sickness. Contact the Lithography Group for rescheduling if this poses a problem.</span>''' <span style="text-decoration: line-through;">'''NEXT LECTURE: Tuesday 29th of November 9:15 - 13:00 (B347, Seminar room)'''</span>-->
*Lecture once a month (~3.5 hours). '''NEXT LECTURE: <span style="color: red;">Starting February 2017 (Week 06), the lecture will be replaced by videos and a short "questions and exercises" session. More info will come later this month.</span>'''
'''Theoretical part'''
*Training session once a week, max. 4 persons per session (9:00 - 14:00). '''NEXT SESSIONS: 8th of February, 15th of February, 22nd of February'''
* The lecture has been replaced by videos that can be viewed at one's own leisure.
* A 1 hour "questions and exercises" session will be planned as needed.  
* '''NEXT "questions and exercises" session: Friday 3rd of February 09:30-10:30'''
'''Practical part'''
* A training session once a week, max. 4 persons per session (9:00 - 14:00).  
* '''NEXT training sessions: 8th of February, 15th of February, 22nd of February'''
|-
|-


|-
|-
!Location
!Location
|Seminar room bulding 347 at DTU Danchip and in cleanroom facilities at DTU Danchip
|
'''Theoretical part'''
* The location of the "questions and exercises" session will be specified after signing up to the course.
'''Practical part'''
* The training session takes place inside the cleanroom. The meeting point will be in front of the first machine.
|-
|-


Line 240: Line 249:
|
|
* Cleanroom safety course at DTU Danchip  
* Cleanroom safety course at DTU Danchip  
* Wet Chemistry Course at DTU Danchip (Lab-Intro)
* Admission to the cleanroom must be obtained before the training session
|-
|-


Line 246: Line 255:
!Preparations
!Preparations
|
|
'''Before the lecture'''
'''Before the "questions and exercises" session'''
* Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography. (Available online from DTU campus, see link below)
* Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography. (Available online from DTU campus, see link below)
* Optional but recommended: Watch the training videos (training videos can be found below).
* Watch the lecture videos (7 videos, 2:41 hours in total). A link to the lecture videos can be found below.
'''Before training session'''
'''Before training session'''
* Watch the training videos of spin coating (automatic), exposure (operation and alignment), and development (automatic). The training videos can be found below.
* Watch the training videos of spin coating (automatic), exposure (operation and alignment), and development (automatic). The training videos can be found below.
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography"