Specific Process Knowledge/Lithography: Difference between revisions
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!Preparations | !Preparations | ||
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Before the lecture | '''Before the lecture''' | ||
* Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography. (Available online from DTU campus, see link below) | * Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography. (Available online from DTU campus, see link below) | ||
* Optional but recommended: Watch the training videos (training videos can be found below). | * Optional but recommended: Watch the training videos (training videos can be found below). | ||
Before training session | '''Before training session''' | ||
* Watch the training videos of spin coating (automatic), exposure (operation and alignment), and development (automatic). The training videos can be found below. | * Watch the training videos of spin coating (automatic), exposure (operation and alignment), and development (automatic). The training videos can be found below. | ||
* Study the equipment manuals. The manuals are available in LabManager. | * Study the equipment manuals. The manuals are available in LabManager. | ||