Specific Process Knowledge/Lithography: Difference between revisions

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 *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch10/pdf Franssila, 2010, Chapter 10: Advanced Lithography]
 *[[Media:Litho_Tool_Package_-_1_Introduction_v2_TIGRE_%28TARAN_ed%29.pdf|TPT slides: Introduction]]
-*[http://labadviser.danchip.dtu.dk/images/7/77/Litho_Tool_Package_-_1_Introduction_v2_TIGRE_%28TARAN_ed%29.pdf TPT slides: Introduction]
 *[http://www.microchemicals.com/support/troubleshooter.html Lithography Troubleshooter from MicroChemicals]
 *[http://www.microchemicals.com/downloads/application_notes.html Application Notes from MicroChemicals]
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 '''<big>Spin Coating</big>'''
-*[[Media:Litho_Tool_Package_-_2_Spin_coating_v8_LESJO_%28TARAN_ed%29.pdf|TPT slides: Spin Coating]]
+*[[:File:Litho Tool Package - 2 Spin coating v2 LESJO (TARAN ed).pdf|TPT: Spin Coating]]
-*[http://labadviser.danchip.dtu.dk/images/a/ac/Litho_Tool_Package_-_2_Spin_coating_v8_LESJO_%28TARAN_ed%29.pdf TPT slides: Spin Coating]
 *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.055_Spin_Coater_GAMMA_UV-720p.mp4 Training Video: Automatic Spin Coater]'''
 *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.057_Manual_Spin_Coater-720p.mp4 Training Video: Manual Spin Coater]'''