Specific Process Knowledge/Lithography/UVLithography: Difference between revisions
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* '''Mask''': Design and order a photomask for your UV process. A detailed instruction on how to design and order a photomask can be found here. | * '''Mask''': Design and order a photomask for your UV process. A detailed instruction on how to design and order a photomask can be found here. | ||
* '''Substrate pretreatment''': In many processes it is recommended to pretreat your wafer before spin-coating. In some spin-coaters, these pretreatment processes are included in the spin coating of resist. If you use either the '''RCD8, SSE or a manual spin coater''', you should book equipment for pretreatment prior to spin coating. | * '''Substrate pretreatment''': In many processes it is recommended to pretreat your wafer before spin-coating. In some spin-coaters, these pretreatment processes are included in the spin coating of resist. If you use either the '''RCD8, SSE or a manual spin coater''', you should book equipment for pretreatment prior to spin coating. | ||
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= Resist Overview = | = Resist Overview = | ||