Specific Process Knowledge/Lithography: Difference between revisions
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You are required to pass this course, in order to get access to using the lithography equipment inside the DTU Nanolab fabrication facility (The Cleanroom). | You are required to pass this course, in order to get access to using the lithography equipment inside the DTU Nanolab fabrication facility (The Cleanroom). | ||
For details, dates, and course material, please check the course description under [[LabAdviser/Courses#The_Lithography_TPT|Courses]]. | |||
'''Signing up for the course''' | |||
The course is in DTU Learn. You sign up for the course by enrolling yourself in the course [https://learn.inside.dtu.dk/d2l/le/discovery/view/course/56077 DTU Nanolab TPT: Lithography] - '''requires login''' | |||
* Watch the lecture videos | |||
* Successfully complete all the quizzes | |||
'''Learning objectives''' | |||
Learn about the fundamentals of lithography processing in a cleanroom fabrication lab: | |||
Learn about the fundamentals of | |||
* Coating | * Coating | ||
* Exposure | * Exposure | ||
* Development | * Development | ||
* Post- | * Resist, substrates and pre-treatment | ||
* Post-lithography steps | |||
'''After completing the TPT''' | |||
When all TPT quizzes have been completed successfully, you have finished the lithography TPT, and can begin the online training on the lithography equipment you need to use. | |||
After completing the online equipment training, you become eligible for the hands-on authorization training, which will take place inside the cleanroom. | |||
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