Specific Process Knowledge/Lithography: Difference between revisions
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!Generel description | !Generel description | ||
|Pattern transfer via | |Pattern transfer via ultraviolet (UV) light | ||
|Pattern transfer via | |Pattern transfer via deep ultraviolet (DUV) light | ||
|Patterning by electron beam | |Patterning by electron beam | ||
|Pattern transfer via hot embossing (HE) | |Pattern transfer via hot embossing (HE) | ||