Specific Process Knowledge/Lithography: Difference between revisions
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The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment. | The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment. | ||
For details, dates, and course material, please check the course description | |||
'''For details, dates, and course material, please check the course description under [[LabAdviser/Courses#The_Lithography_TPT|Courses]].''' | |||
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* The lecture has been replaced by videos that can be viewed at one's leisure. | * The lecture has been replaced by videos that can be viewed at one's leisure. | ||
* A 1 hour "questions and exercises" session once or twice a month will be planned as needed (typically Fridays 09:30-10:30). | * A 1 hour "questions and exercises" session once or twice a month will be planned as needed (typically Fridays 09:30-10:30). | ||
* NEXT "questions and exercises" sessions: '''24th of March, 31st of March, 21st of April, 28th of April, 19th of May''' | <!--* NEXT "questions and exercises" sessions: '''24th of March, 31st of March, 21st of April, 28th of April, 19th of May'''--> | ||
'''Practical part''' | '''Practical part''' | ||
* A 4-5 hour training session once a week, max. 4 persons per session (typically Wednesdays 09:00 - 14:00). | * A 4-5 hour training session once a week, max. 4 persons per session (typically Wednesdays 09:00 - 14:00). | ||
* NEXT training sessions: '''29th of March, 5th of April, 26th of April, 3rd of May, 24th of May''' | <!--* NEXT training sessions: '''29th of March, 5th of April, 26th of April, 3rd of May, 24th of May'''--> | ||
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'''Before the "questions and exercises" session''' | '''Before the "questions and exercises" session''' | ||
* Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography. (Available online from DTU campus) | * Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography. (Available online from DTU campus) | ||
* Watch the | * Watch the lecture videos (7 videos, 2:41 hours in total). Write down any questions that may arise during the videos. | ||
'''Before training session''' | '''Before training session''' | ||
* Watch the training videos of spin coating (automatic), exposure (operation, and alignment), and development (automatic). | * Watch the training videos of spin coating (automatic), exposure (operation, and alignment), and development (automatic). | ||
* Study the equipment manuals. The manuals are available in LabManager. | * Study the equipment manuals. The manuals are available in LabManager. | ||
* Study the TPT process flows (first print, and alignment). | * Study the TPT process flows (first print, and alignment). | ||
'''Links to literature, lecture videos, training videos, equipment manuals, and process flows can be found in the "Knowledge and Information" section below. | <!--'''Links to literature, lecture videos, training videos, equipment manuals, and process flows can be found in the "Knowledge and Information" section below.'''--> | ||
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