Specific Process Knowledge/Lithography: Difference between revisions
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*[http://onlinelibrary.wiley.com/doi/10.1002/9781118557662.ch3/summary Stefan Landis,Lithography, Chapter 3: E-beam Lithography] | *[http://onlinelibrary.wiley.com/doi/10.1002/9781118557662.ch3/summary Stefan Landis,Lithography, Chapter 3: E-beam Lithography] | ||
'''<big>Lecture videos</big>''' | |||
*[http://podcast.llab.dtu.dk/index.php?id=302 Lecture videos (7 videos, 2:41 hours in total)] | |||
'''<big>Slides from Lecture</big>''' | |||
*[[:Media:Litho_Tool_Package_-_Introduction.pdf|TPT slides: Introduction]] | |||
*[[:Media:Litho_Tool_Package_-_Spin_coating.pdf|TPT slides: Spin Coating]] | |||
*[[:Media:Litho_Tool_Package_-_Exposure.pdf|TPT slides: UV Exposure]] | |||
*[[:Media:Litho_Tool_Package_-_Development.pdf|TPT slides: Development]] | |||
*[[:Media:Litho_Tool_Package_-_Post_processing.pdf|TPT slides: Post-processing]] | |||
*[[:Media:Litho_Tool_Package_-_Process_effects_and_examples.pdf|TPT slides: Process Effects and Examples]] | |||
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'''<big>Training videos</big>''' | '''<big>Training videos</big>''' | ||
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*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.049_Developer_Manual-720p.mp4 Training Video: Manual Puddle Developer] | *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.049_Developer_Manual-720p.mp4 Training Video: Manual Puddle Developer] | ||
'''<big>Manuals</big>''' | '''<big>Manuals</big>''' | ||
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*[[:Media:Process_Flow_TPT first print.pdf|TPT first print process flow]] | *[[:Media:Process_Flow_TPT first print.pdf|TPT first print process flow]] | ||
*[[:Media:Process_Flow_TPT alignment.pdf|TPT alignment process flow]] | *[[:Media:Process_Flow_TPT alignment.pdf|TPT alignment process flow]] | ||
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