Specific Process Knowledge/Lithography: Difference between revisions
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'''<big>Slides from Lecture</big>''' | '''<big>Slides from Lecture</big>''' | ||
*[[Media:Litho_Tool_Package_- | *[[Media:Litho_Tool_Package_-_Introduction.pdf|TPT slides: Introduction]] | ||
*[[:Media: | *[[:Media:Litho_Tool_Package_-_Spin_coating.pdf|TPT slides: Spin Coating]] | ||
*[[:Media:Litho Tool Package - 3 Exposure v2 TARAN.pdf|TPT slides: UV Exposure]] | *[[:Media:Litho Tool Package - 3 Exposure v2 TARAN.pdf|TPT slides: UV Exposure]] | ||
*[[:Media:Litho Tool Package - 4 Development v2 TARAN.pdf|TPT slides: Development]] | *[[:Media:Litho Tool Package - 4 Development v2 TARAN.pdf|TPT slides: Development]] | ||
*[[:Media:Litho Tool Package - 4 Development v2 TARAN.pdf|TPT slides: Post-processing]] | |||
*[[:Media:Litho Tool Package - 5 Process effects and examples v2 TARAN.pdf|TPT slides: Process Effects and Examples]] | *[[:Media:Litho Tool Package - 5 Process effects and examples v2 TARAN.pdf|TPT slides: Process Effects and Examples]] | ||