Specific Process Knowledge/Lithography: Difference between revisions
| Line 305: | Line 305: | ||
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch9/pdf Franssila, 2010, Chapter 9: Optical Lithography] | *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch9/pdf Franssila, 2010, Chapter 9: Optical Lithography] | ||
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch10/pdf Franssila, 2010, Chapter 10: Advanced Lithography] | *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch10/pdf Franssila, 2010, Chapter 10: Advanced Lithography] | ||
*[http://www.microchemicals.com/support/troubleshooter.html Lithography Troubleshooter from MicroChemicals] | *[http://www.microchemicals.com/support/troubleshooter.html Lithography Troubleshooter from MicroChemicals] | ||
*[http://www.microchemicals.com/downloads/application_notes.html Application Notes from MicroChemicals] | *[http://www.microchemicals.com/downloads/application_notes.html Application Notes from MicroChemicals] | ||
| Line 319: | Line 318: | ||
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.049_Developer_Manual-720p.mp4 Training Video: Manual Puddle Developer]''' | *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.049_Developer_Manual-720p.mp4 Training Video: Manual Puddle Developer]''' | ||
| style="width: 20%"| | |||
'''<big>Slides from Lecture</big>''' | '''<big>Slides from Lecture</big>''' | ||
*[[Media:Litho_Tool_Package_-_1_Introduction_v2_TIGRE_%28TARAN_ed%29.pdf|TPT slides: Introduction]] | |||
*[[:Media:Litho Tool Package - 2 Spin coating v2 LESJO (TARAN ed).pdf|TPT slides: Spin Coating]] | *[[:Media:Litho Tool Package - 2 Spin coating v2 LESJO (TARAN ed).pdf|TPT slides: Spin Coating]] | ||
*[[:Media:Litho Tool Package - 3 Exposure v2 TARAN.pdf|TPT slides: UV Exposure]] | *[[:Media:Litho Tool Package - 3 Exposure v2 TARAN.pdf|TPT slides: UV Exposure]] | ||
| Line 330: | Line 330: | ||
*[[:Media:Process_Flow_TPT first print.pdf|TPT first print process flow]] | *[[:Media:Process_Flow_TPT first print.pdf|TPT first print process flow]] | ||
*[[:Media:Process_Flow_TPT alignment.pdf|TPT alignment process flow]] | *[[:Media:Process_Flow_TPT alignment.pdf|TPT alignment process flow]] | ||
'''<big>Resists</big>''' | |||
*[[Specific_Process_Knowledge/Lithography/UVLithography#Resist_Overview|UV Resist Overview]] | |||
*[[Specific_Process_Knowledge/Lithography/EBeamLithography#E-beam_resists_and_Process_Flows|E-beam Resist Overview]] | |||
| style="width: 20%"| | | style="width: 20%"| | ||
| Line 347: | Line 353: | ||