Specific Process Knowledge/Lithography: Difference between revisions
| Line 311: | Line 311: | ||
*[http://onlinelibrary.wiley.com/doi/10.1002/9781118557662.ch3/summary Stefan Landis,Lithography, Chapter 3: E-beam Lithography] | *[http://onlinelibrary.wiley.com/doi/10.1002/9781118557662.ch3/summary Stefan Landis,Lithography, Chapter 3: E-beam Lithography] | ||
'''<big>Training videos</big>''' | |||
'''<big> | |||
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.055_Spin_Coater_GAMMA_UV-720p.mp4 Training Video: Automatic Spin Coater]''' | *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.055_Spin_Coater_GAMMA_UV-720p.mp4 Training Video: Automatic Spin Coater]''' | ||
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.057_Manual_Spin_Coater-720p.mp4 Training Video: Manual Spin Coater]''' | *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.057_Manual_Spin_Coater-720p.mp4 Training Video: Manual Spin Coater]''' | ||
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part1_operation-720p.mp4 Training Video: UV Mask Aligner Part I (Operation)] | |||
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part2_aligning-720p.mp4 Training Video: UV Mask Aligner Part II (Alignment)] | |||
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.050_Developer_TMAH_UV-Lithography-720p.mp4 Training Video: Automatic Puddle Developer]''' | |||
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.049_Developer_Manual-720p.mp4 Training Video: Manual Puddle Developer]''' | |||
'''<big>Slides from Lecture</big>''' | |||
*[[:Media:Litho Tool Package - 2 Spin coating v2 LESJO (TARAN ed).pdf|TPT slides: Spin Coating]] | |||
*[[:Media:Litho Tool Package - 3 Exposure v2 TARAN.pdf|TPT slides: UV Exposure]] | |||
*[[:Media:Litho Tool Package - 4 Development v2 TARAN.pdf|TPT slides: Development]] | |||
*[[:Media:Litho Tool Package - 5 Process effects and examples v2 TARAN.pdf|TPT slides: Process Effects and Examples]] | |||
'''<big>Process Flows</big>''' | |||
*[[:Media:Process_Flow_TPT first print.pdf|TPT first print process flow]] | |||
*[[:Media:Process_Flow_TPT alignment.pdf|TPT alignment process flow]] | |||
| style="width: 20%"| | | style="width: 20%"| | ||
'''<big>UV Exposure</big>''' | '''<big>UV Exposure</big>''' | ||
*[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/UVExposure_Dose Information on UV Exposure Dose] | *[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/UVExposure_Dose Information on UV Exposure Dose] | ||
| Line 338: | Line 348: | ||
| style="width: 20%"| | | style="width: 20%"| | ||
| Line 350: | Line 355: | ||
|} | |} | ||
<br clear="all" /> | <br clear="all" /> | ||